Nanofabrication

Finding new and highly useful nanofabrication techniques is essential to continuously pushing the limits of science and technology. Thanks to the sophisticated lithography, etching and processing techniques our research group has developed, we continuosly fabricate structures with lateral dimensions as small as 2.89 nm. We have mastered and exploited our techniques to create sub-10m diameter silicon structures capable of light emission, lithographically defined quantum dots for tunable resonant tunneling devices, nanopore devices, and suspended membranes with nanometer scale pores for biological sensing and characterization.