Caltech Nanofabrication Group

  • Increase font size
  • Default font size
  • Decrease font size
Home Research Nanofabrication

Fully MEMS- and Nanostructured Batch Fabrication of SMT Inductors

Research Area: Nanofabrication Year: 2000
Type of Publication: Article Keywords: surface mount, inductor, MEMS
Authors: F. Wiest; G. Freitag; Michael Hochberg; Axel Scherer; I. Eisele; T. Doll
Journal: Micro Tec Volume: 2
Pages: 843-847
Abstract:
We present the first parallel batch fabrication of miniaturized three dimensional, inductive components. The process uses a deep proximity lithography and electroplating onto pre-formed polymer substrates. The high frequency performance of these MEMS inductors is better than the current state of the art, which is mainly a result of the low dielectric loss in the inductor body and a reduced skin effect on the electroplated inductor windings. In addition, we discuss a novel process on the growth of nanoinductors in porous alumina for embedded and integrated passives.
Full text:
PDF: Caltech only

Contact

Administrative and Financial Contact

Kate Finigan
MC 200-36, Caltech
1200 E California Blvd
Pasadena, CA 91125

Office:  212 Sloan Annex
Phone:  626.395.4585
Fax: 626.577.8442
Email: kate@caltech.edu

Login