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Microfabrication and Electron Scattering in Very Small Devices

Research Area: Nanofabrication Year: 1989
Type of Publication: In Proceedings Keywords: boundary scattering, mobility, microfabrication techniques, confinement, electron transport
Authors: T. J. Thornton; M. L. Roukes; Axel Scherer; B. P. Van der Gaag
Editor: unk
Book title: International Symposium on GaAs and Related Compounds
Series: Institute of Physics Conference Series Pages: 861-868
Abstract:
We discuss some of the microfabrication techniques suitable for patterning very small devices and how the additional confinement changes the electron transport. In particular, we consider the boundary scattering and mobility of electrons in narrow wires.

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