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Micro-Machined Electron Transparent Alumina Vacuum Windows

Research Area: Nanofabrication Year: 2000
Type of Publication: Article Keywords: electron transmission, porous alumina, membranes, atmospheric EDX, vacuum window
Authors: T. Doll; Michael Hochberg; David Barsic; Axel Scherer
Journal: Sensors and Actuators Volume: 87
Number: 1-2 Pages: 52-59
Month: December
Abstract:
We report the use of porous alumina membranes as stable electron transparent windows for atmospheric electron spectroscopy applications. This material is very brittle and under compressive stress, and therefore of limited use. We developed a method of forming these membranes being tensile, within a monolithic, stable aluminum frame, enabling handling and making it possible to mount these elements in MEMS systems. Ten micron thick membranes showed a high electron transmissivity for electron energies down to 5 kV, and their mechanical properties are close to state of the art for MEMS vacuum windows. Self-collimated channeling of electrons along the pores is proposed as an explanation for the unexpected electron transparency of these membranes.
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