Caltech Nanofabrication Group

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Home Research Nanofabrication



Continually pushing the boundaries of science and technology requires an endless search for novel and high utility nanofabrication techniques.  Through the advanced lithography, masking, etching, and processing techniques we have developed, we regularly produce structures with lateral dimensions as small as 2nm, fabricate devices exhibiting aspect ratios of 60:1, and explore new device geometries using sophisticated 3-dimensional etch control.  We have exploited these techniques to create sub-10nm diameter silicon structures capable of light emission, lithographically-defined quantum dots for tunable resonant tunneling devices, and suspended membranes with nanometer scale pores for biological sensing and characterization.  Our research laboratory is built around producing such nanostructures and applying them to new optoelectronic, biomedical, and quantum-confined electronic devices, enabling higher speeds, greater efficiencies, as well as scientific investigation and technological integration in ways previously unachievable.







  • Walavalkar, S., Latawiec, P., Homyk, A. & Scherer, A. (2014). Scalable Method for the Fabrication and Testing of Glass-Filled, Three-Dimensionally Sculpted Extraordinary Transmission Apertures. Nano Letters, Advanced Online. [More] 
  • Walavalkar, S., Latawiec, P. & Scherer, A. (2013). Coulomb Blockade in Vertical, Bandgap Engineered Silicon Nanopillars. Applied Physics Letters, 102(18), 183101. [More] 
  • Walavalkar, S., Homyk, A., Henry, D. & Scherer, A. (2012). Three-Dimensional Etching of Silicon for the Fabrication of Low-Dimensional and Suspended Devices. Nanoscale, Advanced online. [More] 
  • Chien, C. Y., Chang, Y. -., Chen, K. H., Lai, W.-T., George, T., Scherer, A. et al. (2011). Nanoscale, Catalytically Enhanced Local Oxidation of Silicon-containing Layers by 'Burrowing' Ge Quantum Dots. Nanotechnology, 22(43), 435602. [More] 
  • Chen, K. H., Chien, C. Y., Lai, W.-T., George, T., Scherer, A. & Li, P. -. (2011). Controlled Heterogeneous Nucleation and Growth of Germanium Quantum Dots on Nanopatterned Silicon Dioxide and Silicon Nitride Substrates. Crystal Growth & Design, 11(7), 3222-3226. [More] 


Administrative and Financial Contact

Kate Finigan
MC 200-36, Caltech
1200 E California Blvd
Pasadena, CA 91125

Office:  212 Sloan Annex
Phone:  626.395.4585
Fax: 626.577.8442