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High-Q Optical Resonators in Silicon-on-Insulator-Based Slot Waveguides

Research Area: Nanophotonics Year: 2005
Type of Publication: Article Keywords: silicon, silicon compounds, elemental semiconductors, semiconductor thin films, silicon-on-insulator, optical resonators, optical waveguides, optical modulation, Q-factor, refractive index, optical losses
Authors: Tom Baehr-Jones; Michael Hochberg; Chris Walker; Axel Scherer
Journal: Applied Physics Letters Volume: 86
Number: 8 Pages: 081101
Month: February
This letter describes the design, fabrication and characterization of high-Q oval resonators based on slot waveguide geometries in thin silicon-on-insulator material. Optical quality factors of up to 27 000 were measured in such filters, and we estimate losses of –10 dB/cm in the slotted waveguides on the basis of our resonator measurements. Such waveguides enable the concentration of light to very high optical fields within nanoscale dimensions, and show promise for the confinement of light in low-index material with potential applications for optical modulation, nonlinear optics and optical sensing.
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