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High-Q Ring Resonators in Thin Silicon-on-Insulator

Research Area: Nanophotonics Year: 2004
Type of Publication: Article Keywords: silicon-on-insulator, optical resonators, optical losses, thin films, microcavities, claddings, refractive index, optical waveguides, micro-optics
Authors: Baehr-Jones, Tom; Hochberg, Michael; Walker, Chris; Scherer, Axel
Journal: Applied Physics Letters Volume: 85
Number: 16 Pages: 3346-3347
Month: October
We have fabricated high-Q microrings from thin silicon-on-insulater SOI layers and measured Q values of 45 000 in these rings, which were then improved to 57 000 by adding a PMMA cladding. The optimal waveguide designs were calculated, and the waveguide losses were analyzed. These high-Q resonators are expected to lead to interesting devices for telecommunication filters and sources as well as optical refractive index sensing.
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