|Type of Publication:||Article||Keywords:||photonic crystal, nanobeam, cavity, quality factor, tunable, CMOS, silicon photonics, thermo-optic, filter|
|Authors:||Fegadolli, William; Oliveira, J. E. B.; Almeida, V. R.; Scherer, Axel|
A proof-of-concept for a new and entirely CMOS compatible tunable nanobeam cavity is demonstrated in this paper. Preliminary results show that a compact nanobeam cavity (~20 μm2) with high Q-factor (~50,000) and integrated with a micro-heater atop, is able of tuning the resonant wavelength up to 15 nm with low power consumption (0.35nm/mW), and of attaining high modulation depth with only ~100 μW. Additionally, a tunable bi-stable behavior is reported.
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