Caltech Nanofabrication Group

  • Increase font size
  • Default font size
  • Decrease font size
Home Publications

Microscaled and Nanoscaled Platinum Sensors

Research Area: Nanofabrication Year: 2010
Type of Publication: Article Keywords: microfabrication, microsensors, nanolithography, nanosensors, platinum, resistance thermometers, resistors
Authors: Rajagopal, Aditya; Walavalkar, Sameer; Chen, S.; Guo, L.; Gwinn, T.; Scherer, Axel
Journal: Applied Physics Letters Volume: 97
Number: 13 Pages: 133109
Month: September
Abstract:
We show small and robust platinum resistive heaters and thermometers that are defined by microlithography on silicon substrates. These devices can be used for a wide range of applications, including thermal sensor arrays, programmable thermal sources, and even incandescent light emitters. To explore the miniaturization of such devices, we have developed microscaled and nanoscaled platinum resistor arrays with wire widths as small as 75 nm, fabricated lithographically to provide highly localized heating and accurate resistance (and hence temperature) measurements. We present some of these potential applications of microfabricated platinum resistors in sensing and spectroscopy.
Full text:
PDF: Caltech only
Online version (publisher)

Contact

Administrative and Financial Contact

Kate Finigan
MC 200-79, Caltech
1200 E California Blvd
Pasadena, CA 91125

Office:  215 Powell-Booth
Phone:  626.395.4585
Fax: 626.577.8442
Email: kate@caltech.edu

Login