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Wafer-Bonded Single-Crystal Silicon Slot Waveguides and Ring Resonators

Research Area: Nanophotonics Year: 2009
Type of Publication: Article Keywords: diffraction gratings, elemental semiconductors, integrated optics, optical losses, optical resonators, optical waveguides, Q-factor, silicon, silicon compounds, silicon-on-insulator
Authors: Briggs, R. M.; Shearn, Mike; Scherer, Axel; Atwater, H. A.
Journal: Applied Physics Letters Volume: 94
Number: 2 Pages: 021106
Month: January
We fabricated horizontal Si slot waveguides with a 25 nm SiO2 slot layer by bonding thin Si-on-insulator wafers. After removing the Si substrate and buried oxide from one side of the bonded structure, grating-coupled waveguides and ring resonators were partially etched into the Si/SiO2/Si device layers. The gratings exhibit efficiencies of up to 23% at 1550 nm and the ring resonators were measured to have loaded quality factors near 42 000 for the lowest-order transverse-electric mode, corresponding to a propagation loss of 15 dB/cm. The leaky lowest-order transverse-magnetic mode was also observed with a propagation loss of 44 dB/cm.
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