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Two-Dimensional Photonic Crystals for GaN-Based Blue Light Emitters

Research Area: Nanophotonics Year: 1998
Type of Publication: In Proceedings Keywords: photonic crystal, LED, electron-beam lithography, ion beam, CAIBE
Authors: Yoshie, Tomoyuki; Cheng, Chuan-Cheng; Scherer, Axel
Editor: unk
Series: IEEE Semiconductor Laser Conference '98 Pages: 189-190
We successfully fabricated two-dimensional photonic crystal structures for III-nitride light emitters by integrating electron-beam lithography, xenon/chlorine-based chemically assisted ion beam etching and a multilayer pattern transfer
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