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Surface Micromachined Membranes for Tunnel Transducers

Research Area: Nanofabrication Year: 1997
Type of Publication: Article Keywords: transducers, tunnelling, micromachining, membranes, silicon compounds
Authors: Wong, Joyce; Scherer, Axel; George, T.
Journal: Journal of Vacuum Science and Technology B Volume: 15
Number: 6 Pages: 2768-2772
Month: November
We have developed low-temperature surface micromachining procedures for the fabrication of suspended SiO2/Si3N4 membranes. This fabrication method was integrated with electron beam lithography, anisotropic ion etching, and electroplating to construct electrostatically deflectable tunnel transducers. We show the structures and some preliminary measurements on the performance of these monolithic devices.
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