Caltech Nanofabrication Group

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Home Announcements Events Dr. David Henry at EIPBN, May 31, 2010
Thursday, 22 April 2010 15:58

Dr. David Henry at EIPBN, May 31, 2010

Silicon Nanowires Fabricated using FIB Implanted Ga Etch Masks for Plasma Etching

Anchorage, AK
May 31, 2010

Recent nanofab graduate David Henry will describe a new dry masking technique for nanoscale silicon processing at the 54th International Conference  on Electron, Ion, and Photon Beam Technology and Nanofabrication.



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